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Good Quality Gas - Carbon Tetrafluoride – YANXA

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Good Quality Gas - Carbon Tetrafluoride – YANXA Detail:

Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon (CF4). It has a very high bonding strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane. Because of the multiple carbon–fluorine bonds, and the highest electronegativity of fluorine, the carbon in tetrafluoromethane has a significant positive partial charge which strengthens and shortens the four carbon–fluorine bonds by providing additional ionic character. Tetrafluoromethane is a potent greenhouse gas.

Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.

Chemical formula	CF4	Molecular weight	88
CAS No.	75-73-0	EINECS No.	200-896-5
Melting point	-184℃	Boling point	-128.1℃
solubility	Insoluble in water	Density	1.96g/cm³（-184℃）
Appearance	A colorless, odorless, nonflammable, compressible gas	Application	used in plasma etching process for various integrated circuits, and used also as laser gas, refrigerant etc.
DOT ID Number	UN1982	DOT/IMO SHIPPING NAME:	Tetrafluoromethane, Compressed or Refrigerant Gas R14
		DOT Hazard Class	Class 2.2

Item	Value, grade I	Value, grade II	Unit
Purity	≥99.999	≥99.9997	%
O₂	≤1.0	≤0.5	ppmv
N₂	≤4.0	≤1.0	ppmv
CO	≤0.1	≤0.1	ppmv
CO₂	≤1.0	≤0.5	ppmv
SF₆	≤0.8	≤0.2	ppmv
Other fluorocarbons	≤1.0	≤0.5	ppmv
H₂O	≤1.0	≤0.5	ppmv
H₂	≤1.0	——	ppmv
Acidity	≤0.1	≤0.1	ppmv
*other fluorocarbons refer to C₂F₆、C₃F₈

Notes
1) all the technical data indicated above are for your reference.
2) alternative specification is welcome for further discussion.

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R 14

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