
| ihe | Ngwongwo teknụzụ | |
| Ịdị ọcha nke Argon (Ar) (nkebi olu)/10-2≥ | 99.9999 | 99.9992 |
| Haịdrojiin (H)2) ọdịnaya (ngalaba olu)/10-6≤ | 0.1 | 1 |
| Nitrogen (N)2) ọdịnaya (ngalaba olu)/10-6≤ | 0.5 | 5 |
| Oxygen (O2)2) ọdịnaya (ngalaba olu)/10-6≤ | 0.2 | 0.5 |
| Mkpokọta ọdịnaya nke carbon monoxide (CO) na carbon dioxide (CO)2), (ngalaba olu)/10-6≤ | Carbon monoxide: 0.1 Kabọn daịọksịdọk: 0.1 | 0.5 |
| Ngụkọta ọdịnaya hydrocarbon (a gbakọọ ya site na methane) (nkebi olu)/10-6≤ | 0.1 | 0.5 |
| Mmiri (H)2O) ọdịnaya (ngalaba olu)/10-6≤ | 0.2 | 0.5 |
| Oke ihe na-adịghị ọcha (nkebi olu)/10-6≤ | 1 | 8 |
| Ọka | Onye na-ebunye ya na onye chọrọ ya kwetara | Onye na-ebunye ya na onye chọrọ ya kwetara |
| Rịba ama: A ga-atụ mmiri dị na argon mmiri mmiri mgbe emechara gasification | ||
Ebe eji eme ihe: a na-ejikarị ya eme ihe maka nhicha, nchebe na nrụgide nke sistemụ ahụ. Enwere ike iji ya mee ihe na ntinye anwụrụ kemịkalụ, sputtering, plasma na ion na-arụ ọrụ, annealing na usoro ndị ọzọ dị iche iche, yana na gas pụrụ iche nke eletrọniki.