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Electronic helium

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Item

Technical Property

High purity helium

Helium He purity (volume fraction)/10-2    ≥

99.999

Neon (Ne) content (volume fraction)/10-6   ≤

4

Hydrogen (H2) content (volume fraction)/10-6 ≤

1

Oxygen (O2) content (volume fraction)/10-6 ≤

1

Argon (Ar) content (volume fraction)/10-6 ≤
Nitrogen (N2) content (volume fraction)/10-6 ≤

2

Carbon monoxide (CO) content (volume fraction)/10-6≤

0.5

Carbon dioxide (CO2) content (volume fraction)/10-6≤

0.5

Methane (CH4) content (volume fraction)/10-6≤

0.5

Water H2O content (volume fraction)/10-6≤

3

Total magazine content/10-6≤

10


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