
| Mea | Waiwai ʻenehana | |
| ʻO ka maʻemaʻe o Argon (Ar) (hapa nui) / 10-2≥ | 99.9999 | 99.9992 |
| ʻO ka hydrogen (H2) ka nui o ka ʻike (hapa nui)/10-6≤ | 0.1 | 1 |
| Naikokene (N2) ka nui o ka ʻike (hapa nui)/10-6≤ | 0.5 | 5 |
| ʻOkikene (O2) ka nui o ka ʻike (hapa nui)/10-6≤ | 0.2 | 0.5 |
| Ka nui o ka nui o ke kalapona monoxide (CO) a me ke kalapona dioxide (CO2), (hapa nui)/10-6≤ | Kalapona monoxide: 0.1 Kalapona ʻokikene: 0.1 | 0.5 |
| Ka nui o ka hydrocarbon (i helu ʻia e ka methane) ka nui (hapa nui) / 10-6≤ | 0.1 | 0.5 |
| Wai (H2O) ka nui o ka ʻike (hapa nui)/10-6≤ | 0.2 | 0.5 |
| Ka nui o ka haumia (hapa nui)/10-6≤ | 1 | 8 |
| ʻO ka palaoa | Ua ʻae ʻia e ka mea hoʻolako a me ka mea noi | Ua ʻae ʻia e ka mea hoʻolako a me ka mea noi |
| Nānā: Pono e ana ʻia ka nui o ka wai o ka argon wai ma hope o ka hoʻoheheʻe ʻia ʻana | ||
Kahua noi: hoʻohana nui ʻia no ka hoʻomaʻemaʻe ʻana, ka pale ʻana a me ke kaomi ʻana o ka ʻōnaehana. Hiki ke hoʻohana ʻia i ka waiho ʻana o ka mahu kemika, ka sputtering, ka plasma a me ka ion etchant ikaika, ka annealing a me nā kaʻina hana like ʻole, a me ke kinoea hui kūikawā uila.