
| Chinhu | Zvivakwa zveUnyanzvi | |
| Kuchena kweArgon (Ar) (chikamu chevhoriyamu)/10-2≥ | 99.9999 | 99.9992 |
| Hydrogen (H)2) zviri mukati (chikamu chevhoriyamu)/10-6≤ | 0.1 | 1 |
| Nitrogen (N)2) zviri mukati (chikamu chevhoriyamu)/10-6≤ | 0.5 | 5 |
| Okisijeni (O2)2) zviri mukati (chikamu chevhoriyamu)/10-6≤ | 0.2 | 0.5 |
| Zvose zviri mu carbon monoxide (CO) uye carbon dioxide (CO2)2), (chikamu chevhoriyamu)/10-6≤ | Kabhoni monoxide: 0.1 Kabhoni dhayiokisaidhi: 0.1 | 0.5 |
| Huwandu hwehydrocarbon (yakayerwa nemethane) (chikamu chevhoriyamu)/10-6≤ | 0.1 | 0.5 |
| Mvura (H)2O) zviri mukati (chikamu chevhoriyamu)/10-6≤ | 0.2 | 0.5 |
| Hunhu hwese hwekusachena (chikamu chevhoriyamu)/10-6≤ | 1 | 8 |
| Zviyo | Zvakabvumidzwa neMutengesi neMubvunzi | Zvakabvumidzwa neMutengesi neMubvunzi |
| Cherechedza: Huremu hwemvura muargon yemvura hunofanira kuyerwa mushure mekugadzika kwegasi | ||
Nzvimbo yekushandisa: inonyanya kushandiswa pakuchenesa, kuchengetedza uye kudzvanya sisitimu. Inogona zvakare kushandiswa mukuisa makemikari mumhepo, kuputira, plasma uye active ion etchant, annealing nedzimwe nzira dzakasiyana, pamwe chete nemumagetsi chaiwo akasanganiswa gasi.