
| Into | Ipropati yoBugcisa | |
| Ubumsulwa beArgon (Ar) (iqhezu levolumu)/10-2≥ | 99.9999 | 99.9992 |
| I-Hydrogen (H)2) umxholo (iqhezu levolumu)/10-6≤ | 0.1 | 1 |
| I-nitrogen (N)2) umxholo (iqhezu levolumu)/10-6≤ | 0.5 | 5 |
| Ioksijini (O2)2) umxholo (iqhezu levolumu)/10-6≤ | 0.2 | 0.5 |
| Umxholo opheleleyo we-carbon monoxide (CO) kunye ne-carbon dioxide (CO2)2), (iqhezu levolumu)/10-6≤ | I-carbon monoxide: 0.1 Ikhabhoni dayokhsayidi: 0.1 | 0.5 |
| Umxholo we-hydrocarbon iyonke (ebalwe yi-methane) (iqhezu lomthamo)/10-6≤ | 0.1 | 0.5 |
| Amanzi (H2O) umxholo (iqhezu levolumu)/10-6≤ | 0.2 | 0.5 |
| Ubungakanani bokungcola (inxalenye yomthamo)/10-6≤ | 1 | 8 |
| Ingqolowa | Kuvunyelwene nguMboneleli kunye noMceli-mngeni | Kuvunyelwene nguMboneleli kunye noMceli-mngeni |
| Qaphela: Umxholo wamanzi we-argon engamanzi kufuneka ulinganiswe emva kokufakelwa kwegesi | ||
Intsimi yokusetyenziswa: isetyenziselwa kakhulu ukucoca, ukukhusela kunye noxinzelelo lwenkqubo. Ingasetyenziswa nakwi-chemical vapor deposition, sputtering, plasma kunye ne-active ion etchant, annealing kunye nezinye iinkqubo ezahlukeneyo, kunye nakwi-electronic special mixed gas.