
| ihe | Ngwongwo teknụzụ | ||
| Nitrogen dị ọcha | Nitrogen dị ọcha nke ukwuu | nitrogen dị ọcha nke ukwuu | |
| Nitrogen (N)2) ịdị ọcha (ngalaba olu)/10-2≥ | 99.99 | 99.999 | 99.9999 |
| Oxygen (O2)2) ọdịnaya (ngalaba olu)/10-6≤ | 50 | 3 | 0.1 |
| Ọdịnaya Argon (Ar) (nkebi olu)/10-6≤ | - | - | 2 |
| Haịdrojiin (H)2) ọdịnaya (ngalaba olu)/10-6≤ | 15 | 1 | 0.1 |
| Ọdịnaya nke carbon monoxide (CO) (nkebi olu)/10-6≤ | 5 | 1 | 0.1 |
| Kabọn daịọksịdọt (CO)2) ọdịnaya (ngalaba olu)/10-6≤ | 10 | 1 | 0.1 |
| Methan (CH)4) ọdịnaya (ngalaba olu)/10-6≤ | 5 | 1 | 0.1 |
| Mmiri (H)2O) ọdịnaya (ngalaba olu)/10-6≤ | 15 | 3 | 0.5 |