
| Khoom | Cov Khoom Siv Txuj Ci | ||
| Cov pa nitrogen ntshiab | Cov pa nitrogen ntshiab siab | Nitrogen ntshiab heev | |
| Nitrogen (N)2) kev huv (feem ntim) / 10-2≥ | 99.99 | 99.999 | 99.9999 |
| Cov pa oxygen (O)2) cov ntsiab lus (feem ntim) / 10-6≤ | 50 | 3 | 0.1 |
| Cov ntsiab lus ntawm Argon (Ar) (feem ntim) / 10-6≤ | - | - | 2 |
| Hydrogen (H2) cov ntsiab lus (feem ntim) / 10-6≤ | 15 | 1 | 0.1 |
| Cov pa roj carbon monoxide (CO) cov ntsiab lus (feem ntim) / 10-6≤ | 5 | 1 | 0.1 |
| Cov pa roj carbon dioxide (CO2)2) cov ntsiab lus (feem ntim) / 10-6≤ | 10 | 1 | 0.1 |
| Methane (CH3)4) cov ntsiab lus (feem ntim) / 10-6≤ | 5 | 1 | 0.1 |
| Dej (H2O) cov ntsiab lus (feem ntim) / 10-6≤ | 15 | 3 | 0.5 |