
| Abu | Kadarar Fasaha | ||
| Iskar oxygen mai tsarki | Babban tsarkin iskar oxygen | Iskar oxygen mai tsarki | |
| Iskar Oxygen (O2)2) tsarki (ƙashi mai girma)/10-2≥ | 99.995 | 99.999 | 99.9999 |
| Haydrojiin (H)2) abun ciki (ƙashi mai girma)/10-6≤ | 1 | 0.5 | 0.1 |
| Abun da ke cikin Argon (Ar) (ƙashi mai girma)/10-6≤ | 10 | 2 | 0.2 |
| Nitrogen (N)2) abun ciki (ƙashi mai girma)/10-6≤ | 20 | 5 | 0.1 |
| Carbon dioxide (CO2)2) abun ciki (ƙashi mai girma)/10-6≤ | 1 | 0.5 | 0.1 |
| Jimlar yawan sinadarin hydrocarbon (ƙashi mai yawa) (wanda aka ƙididdige ta hanyar methane)/10-6≤ | 2 | 0.5 | 0.1 |
| Ruwa (H)2O) abun ciki (ƙashi mai girma)/10-6≤ | 3 | 2 | 0.5 |
Filin aikace-aikacen: galibi ana amfani da shi wajen shirya cakuda iskar gas na yau da kullun, binciken kimiyya, samar da da'irori masu haɗawa da na'urorin semiconductor, da sauran fannoni masu buƙatar tsaftar iskar oxygen.