
| ihe | Ngwongwo teknụzụ | ||
| Oxygen dị ọcha | Oxygen dị ọcha nke ukwuu | Oxygen dị ọcha nke ukwuu | |
| Oxygen (O2)2) ịdị ọcha (ngalaba olu)/10-2≥ | 99.995 | 99.999 | 99.9999 |
| Haịdrojiin (H)2) ọdịnaya (ngalaba olu)/10-6≤ | 1 | 0.5 | 0.1 |
| Ọdịnaya Argon (Ar) (nkebi olu)/10-6≤ | 10 | 2 | 0.2 |
| Nitrogen (N)2) ọdịnaya (ngalaba olu)/10-6≤ | 20 | 5 | 0.1 |
| Kabọn daịọksịdọt (CO)2) ọdịnaya (ngalaba olu)/10-6≤ | 1 | 0.5 | 0.1 |
| Mkpokọta ọdịnaya hydrocarbon (nkebi olu) (a gbakọọ ya site na methane)/10-6≤ | 2 | 0.5 | 0.1 |
| Mmiri (H)2O) ọdịnaya (ngalaba olu)/10-6≤ | 3 | 2 | 0.5 |
Ubi ngwa: a na-ejikarị ya eme ihe n'ịkwadebe ngwakọta gas ọkọlọtọ, nnyocha sayensị, mmepụta nke sekit agbakwunyere na ngwaọrụ semiconductor, na ubi ndị ọzọ nwere nnukwu ihe achọrọ maka ịdị ọcha oxygen.