
| Khoom | Cov Khoom Siv Txuj Ci | ||
| Cov pa oxygen ntshiab | Cov pa oxygen siab purity | Cov pa oxygen ntshiab heev | |
| Cov pa oxygen (O)2) kev huv (feem ntim) / 10-2≥ | 99.995 | 99.999 | 99.9999 |
| Hydrogen (H2) cov ntsiab lus (feem ntim) / 10-6≤ | 1 | 0.5 | 0.1 |
| Cov ntsiab lus ntawm Argon (Ar) (feem ntim) / 10-6≤ | 10 | 2 | 0.2 |
| Nitrogen (N)2) cov ntsiab lus (feem ntim) / 10-6≤ | 20 | 5 | 0.1 |
| Cov pa roj carbon dioxide (CO2)2) cov ntsiab lus (feem ntim) / 10-6≤ | 1 | 0.5 | 0.1 |
| Tag nrho cov hydrocarbon cov ntsiab lus (ntim feem) (xam los ntawm methane) / 10-6≤ | 2 | 0.5 | 0.1 |
| Dej (H2O) cov ntsiab lus (feem ntim) / 10-6≤ | 3 | 2 | 0.5 |
Daim teb thov: feem ntau yog siv rau hauv kev npaj cov roj sib xyaw, kev tshawb fawb txog kev tshawb fawb, kev tsim cov voj voog sib xyaw thiab cov khoom siv semiconductor, thiab lwm yam teb uas muaj cov kev xav tau siab rau cov pa oxygen purity.