
| Into | Ipropati yoBugcisa | ||
| Ioksijini ecocekileyo | Ioksijini ecocekileyo kakhulu | Ioksijini ecocekileyo kakhulu | |
| Ioksijini (O2)2) ubunyulu (inxalenye yomthamo)/10-2≥ | 99.995 | 99.999 | 99.9999 |
| I-Hydrogen (H)2) umxholo (iqhezu levolumu)/10-6≤ | 1 | 0.5 | 0.1 |
| Umxholo we-Argon (Ar) (iqhezu levolumu)/10-6≤ | 10 | 2 | 0.2 |
| I-nitrogen (N)2) umxholo (iqhezu levolumu)/10-6≤ | 20 | 5 | 0.1 |
| Ikhabhoni diokside (CO2)2) umxholo (iqhezu levolumu)/10-6≤ | 1 | 0.5 | 0.1 |
| Umxholo opheleleyo we-hydrocarbon (iqhezu lomthamo) (ubalwa nge-methane)/10-6≤ | 2 | 0.5 | 0.1 |
| Amanzi (H2O) umxholo (iqhezu levolumu)/10-6≤ | 3 | 2 | 0.5 |
Intsimi yokusetyenziswa: isetyenziswa kakhulu ekulungiseleleni umxube wegesi oqhelekileyo, uphando lwesayensi, ukuveliswa kweesekethe ezidibeneyo kunye nezixhobo ze-semiconductor, kunye nezinye iindawo ezineemfuno eziphezulu zokucoceka kweoksijini.