
ʻO Tetrafluoromethane, i ʻike ʻia hoʻi ʻo carbon tetrafluoride, ʻo ia ka fluorocarbon maʻalahi loa (CF4). Loaʻa iā ia ka ikaika hoʻopaʻa kiʻekiʻe loa ma muli o ke ʻano o ka pilina carbon-fluorine. Hiki ke hoʻokaʻawale ʻia he haloalkane a halomethane paha. Ma muli o nā pilina carbon-fluorine he nui, a me ke electronegativity kiʻekiʻe loa o ka fluorine, loaʻa i ke kalapona i loko o ka tetrafluoromethane kahi uku hapa maikaʻi koʻikoʻi e hoʻoikaika a hoʻopōkole i nā pilina carbon-fluorine ʻehā ma ka hāʻawi ʻana i ke ʻano ionic hou aʻe. He kinoea ʻōmaʻomaʻo ikaika ʻo Tetrafluoromethane.
I kekahi manawa hoʻohana ʻia ʻo Tetrafluoromethane ma ke ʻano he refrigerant haʻahaʻa haʻahaʻa. Hoʻohana wale ʻia ia i ka hana microfabrication uila a i ʻole i hui pū ʻia me ka oxygen ma ke ʻano he plasma etchant no ka silicon, silicon dioxide, a me ka silicon nitride.
| ʻO ke ʻano kemika | CF4 | Kaumaha molekole | 88 |
| Helu CAS. | 75-73-0 | Helu EINECS. | 200-896-5 |
| Kiko heheʻe | -184℃ | kiko paila | -128.1℃ |
| ka hiki ke hoʻoheheʻe ʻia | ʻAʻole hoʻoheheʻe ʻia i ka wai | Ka nui o ka paʻa | 1.96g/cm³(-184℃) |
| helehelena | He kinoea ʻaʻohe kala, ʻaʻohe ala, ʻaʻole hiki ke lapalapa, a hiki ke hoʻopili ʻia | Noi | hoʻohana ʻia i ke kaʻina hana etching plasma no nā kaapuni hoʻohui like ʻole, a hoʻohana ʻia hoʻi e like me ke kinoea laser, refrigerant etc. |
| Helu ID DOT | UN1982 | INOA HOʻOUNA DOT/IMO: | Tetrafluoromethane, Kinoea i hoʻopaʻa ʻia a i ʻole Refrigerant R14 |
| Papa Pōʻino DOT | Papa 2.2 |
| Mea | Waiwai, papa I | Waiwai, papa II | ʻĀpana |
| Maʻemaʻe | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Nā fluorocarbons ʻē aʻe | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| ʻakika | ≤0.1 | ≤0.1 | ppmv |
| *ʻo nā fluorocarbons ʻē aʻe e pili ana iā C2F6ʻO C3F8 | |||
Nā memo
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