Oloa
Tetrafluoride o le kaponi
O le Tetrafluoromethane, e ta'ua fo'i o le carbon tetrafluoride, o le fluorocarbon sili ona faigofie (CF4). E matua'i maualuga lona malosi e fusifusia ai ona o le natura o le fusifusia o le carbon-fluorine. E mafai fo'i ona fa'avasegaina o se haloalkane po'o le halomethane. Ona o le tele o fusifusia o le carbon-fluorine, ma le maualuga o le electronegativity o le fluorine, o le carbon i le tetrafluoromethane e iai sona totogi fa'apitoa lelei lea e fa'amalosia ma fa'apu'upu'u ai fusifusia e fa o le carbon-fluorine e ala i le tu'uina atu o se uiga fa'aopoopo ionic. O le Tetrafluoromethane o se kasa e fa'avevela ai le ea.
E fa'aaogaina nisi taimi le Tetrafluoromethane o se mea e fa'amālūlū ai le vevela malūlū. E fa'aaogaina na'o ia i le gaosiga o mea eletise laiti pe fa'atasi ma le okesene o se mea e vali ai le plasma mo le silicon, silicon dioxide, ma le silicon nitride.
| Fua fa'akemikolo | CF4 | Mamafa molekiula | 88 |
| Numera CAS. | 75-73-0 | EINECS Nu. | 200-896-5 |
| Tulaga e liusuavai ai | -184℃ | Po'o le fa'apuna | -128.1℃ |
| mafai ona solo | E lē mafai ona fa'a'asu'iina i le vai | Mafiafia | 1.96g/cm³（-184℃） |
| Foliga vaaia | O se kasa e leai se lanu, leai se manogi, e le mu, ma e mafai ona mimilo | Talosaga | faʻaaogaina i le faagasologa o le etching plasma mo matagaluega eseese tuʻufaʻatasia, ma faʻaaogaina foʻi o le laser gas, refrigerant ma isi. |
| Numera ID a le DOT | UN1982 | IGOA O LE FELAUAIGA A LE DOT/IMO: | Tetrafluoromethane, Kasa Fa'a'omi'omi pe Fa'amālūlūina R14 |
| Vasega Lamatiaga a le DOT | Vasega 2.2 |
| Mea | Taua, vasega I | Taua, vasega II | Iunite |
| Mama | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Isi fluorocarbons | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| Oona | ≤0.1 | ≤0.1 | ppmv |
| *o isi fluorocarbons e faasino i le C2F6、C3F8 | |||
Fa'amatalaga
1) o faʻamatalaga faʻapitoa uma o loʻo faʻaalia i luga e mo lau faʻasinomaga.
2) e talia ma le fiafia nisi fa'amatalaga fa'aopoopo mo nisi talanoaga.
