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Imikhiqizo

Isithombe Esifakiwe se-Carbon Tetrafluoride
  • I-Carbon Tetrafluoride

I-Carbon Tetrafluoride

Incazelo emfushane:


Imininingwane Yomkhiqizo

Imibuzo Evame Ukubuzwa

Amathegi Omkhiqizo

I-Tetrafluoromethane, eyaziwa nangokuthi i-carbon tetrafluoride, iyi-fluorocarbon elula kakhulu (CF4). Inamandla okubopha aphezulu kakhulu ngenxa yemvelo yesibopho se-carbon-fluorine. Ingabuye ihlukaniswe njenge-haloalkane noma i-halomethane. Ngenxa yezibopho eziningi ze-carbon-fluorine, kanye ne-electronegativity ephezulu kakhulu ye-fluorine, ikhabhoni ku-tetrafluoromethane ineshaja eyingxenye ebalulekile eqinisa futhi ifinyeze izibopho ezine ze-carbon-fluorine ngokunikeza uhlamvu olwengeziwe lwe-ionic. I-Tetrafluoromethane iyigesi enamandla okushisa.

I-Tetrafluoromethane ngezinye izikhathi isetshenziswa njengesiqandisi esisezingeni eliphansi lokushisa. Isetshenziswa ekukhiqizweni kwe-elekthronikhi kuphela noma ihlanganiswe nomoya-mpilo njenge-plasma etchant ye-silicon, i-silicon dioxide, kanye ne-silicon nitride.

Ifomula yamakhemikhali CF4 Isisindo sama-molecule 88
Inombolo ye-CAS 75-73-0 Inombolo ye-EINECS 200-896-5
Indawo yokuncibilika -184℃ Iphuzu lokubhoboza -128.1℃
ukuncibilika Ayincibiliki emanzini Ubuningi 1.96g/cm³（-184℃）
Ukubukeka Igesi engenambala, engenaphunga, engashi, necindezelwayo Isicelo isetshenziswa enqubweni yokuqopha i-plasma kumasekethe ahlukahlukene ahlanganisiwe, futhi isetshenziswa njengegesi ye-laser, i-refrigerant njll.
Inombolo Yomazisi ye-DOT I-UN1982 IGAMA LOKUTHUMELA LE-DOT/IMO: I-Tetrafluoromethane, Igesi Ecindezelwe Noma Eqandisiwe R14
    Isigaba Sengozi se-DOT Iklasi 2.2
Into

Inani, ibanga I

Inani, ibanga lesi-2

Iyunithi
Ubumsulwa

≥99.999

≥99.9997

%
O2 

≤1.0

≤0.5

i-ppmv
N2 

≤4.0

≤1.0

i-ppmv
CO

≤0.1

≤0.1

i-ppmv
CO2 

≤1.0

≤0.5

i-ppmv
SF6 

≤0.8

≤0.2

i-ppmv
Amanye ama-fluorocarbon

≤1.0

≤0.5

i-ppmv
H2O

≤1.0

≤0.5

i-ppmv
H2

≤1.0

——

i-ppmv
Ubumuncu

≤0.1

≤0.1

i-ppmv

*amanye ama-fluorocarbon abhekisela ku-C2F6、C3F8

Amanothi
1) yonke imininingwane yobuchwepheshe eboniswe ngenhla iwukubhekisela kuwe.
2) imininingwane ehlukile iyamukelekile ukuze kuxoxwe ngayo kabanzi.

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