Ngā Hua
Tetrafluoride Waro
Ko te Tetrafluoromethane, e mōhiotia ana ko te waro tetrafluoride, te waro fluorocarbon māmā rawa (CF4). He tino kaha te hononga nā te āhua o te hononga waro-fluorine. Ka taea hoki te whakarōpū hei haloalkane, hei halomethane rānei. Nā te maha o ngā hononga waro-fluorine, me te kaha hiko teitei o te fluorine, he nui te utunga wāhanga pai o te waro i roto i te tetrafluoromethane e whakapakari ana, e whakapoto ana hoki i ngā hononga waro-fluorine e whā mā te whakarato i te āhua ionic tāpiri. He hau kati kōtuhi kaha te Tetrafluoromethane.
I ētahi wā ka whakamahia te Tetrafluoromethane hei whakamatao pāmahana iti. Ka whakamahia anake i roto i te hanga hiko iti, i te whakakotahitanga rānei me te hāora hei mea whakairo plasma mō te silicon, te silicon dioxide, me te silicon nitride.
| Tātai matū | CF4 | Taumaha ngota | 88 |
| Nama CAS | 75-73-0 | Nama EINECS | 200-896-5 |
| Te pūwāhi rewa | -184℃ | Pūwāhi koropupū | -128.1℃ |
| te wairewatanga | Kāore e rewa i roto i te wai | Kiato | 1.96g/cm³（-184℃） |
| Āhua | He hau kore tae, kore kakara, kore mura, ka taea te pēhi | Tono | e whakamahia ana i roto i te tukanga whakairo plasma mō ngā momo ara iahiko whakauru, ā, e whakamahia ana hoki hei hau taiaho, hei pouaka whakamatao me ētahi atu. |
| Tau ID DOT | UN1982 | INGOA TUKU DOT/IMO: | Tetrafluoromethane, Hau Kōpeke, Hau Whakamatao rānei R14 |
| Akomanga Tūponotanga DOT | Akomanga 2.2 |
| Taonga | Uara, taumata I | Uara, taumata II | Wāhanga |
| Te parakore | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Ētahi atu warowaihā fluoro | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| Te waikawa | ≤0.1 | ≤0.1 | ppmv |
| *ko ētahi atu warowaihā fluoro e pā ana ki te C2F6、C3F8 | |||
Ngā Tuhipoka
1) Ko ngā raraunga hangarau katoa kua whakahuatia i runga ake nei hei tohutoro māu.
2) e mihi ana ki ētahi atu whakatakotoranga hei matapakinga atu.
