Cov khoom
Cov pa roj carbon Tetrafluoride
Tetrafluoromethane, tseem hu ua carbon tetrafluoride, yog cov fluorocarbon (CF4) yooj yim tshaj plaws. Nws muaj lub zog sib txuas siab heev vim yog qhov xwm txheej ntawm cov carbon-fluorine bond. Nws kuj tseem tuaj yeem raug cais ua haloalkane lossis halomethane. Vim yog ntau cov carbon-fluorine bonds, thiab qhov electronegativity siab tshaj plaws ntawm fluorine, cov carbon hauv tetrafluoromethane muaj qhov them ib feem zoo uas ua rau plaub cov carbon-fluorine bonds muaj zog thiab luv luv los ntawm kev muab cov yam ntxwv ionic ntxiv. Tetrafluoromethane yog cov pa roj av muaj zog.
Tetrafluoromethane qee zaum siv ua cov tub yees txias uas kub tsawg. Nws siv rau hauv cov khoom siv hluav taws xob ib leeg lossis ua ke nrog oxygen ua cov plasma etchant rau silicon, silicon dioxide, thiab silicon nitride.
| Cov mis tshuaj | CF4 | Qhov hnyav ntawm cov molecule | 88 |
| CAS Nr. | 75-73-0 | EINECS No. | 200-896-5 |
| Qhov kub yaj | -184 ℃ | Boling point | -128.1 ℃ |
| kev yaj tau | Insoluble hauv dej | Qhov Ceev | 1.96g/cm³（-184℃） |
| Qhov tsos | Ib qho roj uas tsis muaj xim, tsis muaj ntxhiab, tsis kub hnyiab, thiab tuaj yeem nias tau | Daim Ntawv Thov | siv rau hauv cov txheej txheem plasma etching rau ntau yam kev sib xyaw ua ke, thiab kuj siv ua roj laser, refrigerant thiab lwm yam. |
| Tus lej ID DOT | UN1982 | DOT/IMO LUB NPE XA KHOOM: | Tetrafluoromethane, Cov Pa Roj Compressed lossis Refrigerant R14 |
| DOT Chav Kawm Txog Kev Phom Sij | Chav Kawm 2.2 |
| Khoom | Tus nqi, qib I | Tus nqi, qib II | Chav tsev |
| Kev dawb huv | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Lwm cov fluorocarbons | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| Kev ua kua qaub | ≤0.1 | ≤0.1 | ppmv |
| *lwm cov fluorocarbons xa mus rau C2F6,C3F8 | |||
Cov Lus Cim
1) tag nrho cov ntaub ntawv kev qhia saum toj no yog rau koj siv.
2) lwm cov lus qhia tshwj xeeb raug txais tos rau kev sib tham ntxiv.
