Ifektri ye-China Carbon Tetrafluoride kunye nabavelisi

Umfanekiso obonisiweyo weCarbon Tetrafluoride

I-Carbon Tetrafluoride

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Iinkcukacha zeMveliso

FAQ

Iithegi zeMveliso

I-Tetrafluoromethane, ekwaziwa ngokuba yi-carbon tetrafluoride, yeyona fluorocarbon ilula (CF4). Inamandla aphezulu kakhulu okubopha ngenxa yendalo yebhondi ye-carbon-fluorine. Ingahlulwa njenge-haloalkane okanye i-halomethane. Ngenxa yeebhondi ezininzi ze-carbon-fluorine, kunye ne-electronegativity ephezulu ye-fluorine, ikhabhoni kwi-tetrafluoromethane inetshaja encinci ebonakalayo eqinisa kwaye ifinyeze iibhondi ezine ze-carbon-fluorine ngokubonelela ngeempawu ezongezelelweyo ze-ionic. I-Tetrafluoromethane yigesi enamandla okugcina ubushushu.

I-Tetrafluoromethane ngamanye amaxesha isetyenziswa njengefriji eshushu kakhulu. Isetyenziswa kwi-microfabrication ye-elektroniki yodwa okanye xa idityaniswe ne-oxygen njenge-plasma etchant ye-silicon, i-silicon dioxide, kunye ne-silicon nitride.

Ifomula yekhemikhali	CF4	Ubunzima be-molecular	88
Inombolo ye-CAS	75-73-0	Inombolo ye-EINECS	200-896-5
Indawo yokunyibilika	-184℃	Ingongoma yokubhoxa	-128.1℃
ukunyibilika	Ayinyibiliki emanzini	Uxinano	1.96g/cm³（-184℃）
Inkangeleko	Igesi engenambala, engenavumba, engatshiyo, nenokucinezelwa	Isicelo	isetyenziswa kwinkqubo yokugrumba ngeplasma kwiisekethe ezahlukeneyo ezidibeneyo, kwaye isetyenziswa njengegesi yelaser, i-refrigerant njl.
Inombolo yesazisi se-DOT	I-UN1982	IGAMA LOKUTHUMELA LE-DOT/IMO:	I-Tetrafluoromethane, igesi ecinezelweyo okanye efrijini R14
		Udidi lweeNgozi zeDOT	Iklasi 2.2

Into	Ixabiso, ibakala I	Ixabiso, ibakala lesi-2	Iyunithi
Ubunyulu	≥99.999	≥99.9997	%
O₂	≤1.0	≤0.5	i-ppmv
N₂	≤4.0	≤1.0	i-ppmv
CO	≤0.1	≤0.1	i-ppmv
CO₂	≤1.0	≤0.5	i-ppmv
SF₆	≤0.8	≤0.2	i-ppmv
Ezinye iifluorocarbon	≤1.0	≤0.5	i-ppmv
H₂O	≤1.0	≤0.5	i-ppmv
H₂	≤1.0	——	i-ppmv
Ubumuncu	≤0.1	≤0.1	i-ppmv
*ezinye ii-fluorocarbons zibhekisa kwi-C₂F₆、C₃F₈